Columnar and Feather-like Structure Formation of Yttria-stabilized Zirconia Layers Prepared by Electron Beam Physical Vapor Deposition
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چکیده
منابع مشابه
Precursor Decomposition, Microstructure, and Porosity of Yttria Stabilized Zirconia Thin Films Prepared by AerosolAssisted Chemical Vapor Deposition
Microstructures of yttria stabilized zirconia thin fi lms deposited by aerosol assisted chemical vapor deposition (AA-CVD) are correlated with the thermal decomposition behavior of the corresponding metal precursors, zirconium and yttrium 2,4-pentanedionate. Process conditions of AA-CVD are investigated with the aim of producing dense and compact YSZ thin fi lms for applications as gas-tight el...
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ژورنال
عنوان ژورنال: Journal of the Japan Institute of Metals
سال: 2005
ISSN: 0021-4876
DOI: 10.2320/jinstmet.69.2